Other

generates

• Non-Thermal Plasma  Plasma
• Weakly-Ionized Plasma  Plasma

hasApplicationField

• Etching  Application Field
• Film Deposition  Application Field

hasDeviceType

• Capacitively Coupled Plasma (CCP)  Plasma Source Type

plasmaSourceOf

• Benchmarking THz Absorption Spectroscopy against Picosecond TALIF for Atomic Oxygen Density Measurements in Capacitively Coupled RF Oxygen Discharges  Plasma Study
• High-Speed Infrared Imaging of Simultaneous Melting and Plasma Treatment of Polyamide Microparticles in HelixJet for 3D Printing  Plasma Study

usesMedium

• Ar  Medium
• H2  Medium
• N2  Medium
• O2  Medium