conductedBy INP Greifswald Institute Leibniz Institute for Plasma Science and Technology (INP) Institute Schäfer, Jan Person
hasPlasmaSource Capacitively Coupled Plasma (CCP) Source Plasma Source HelixJet Plasma Source High Frequency (HF) Plasma Jet Plasma Source
usesConfiguration Non-thermal atmospheric pressure plasma jet (capacitively coupled). Power: 50 W; Frequency: 27.12 MHz; Flow rate: 1000 sccm Ar; Electrodes: helical configuration with inclination angle 33°; Capillary: inner diameter 7 mm.