Plasma-kg

consistsOf

• Ar  Medium

diagnosedUsing

• Fluid-Poisson Model  Diagnostic Method
• pic-mcc simulation  Diagnostic Method

generatedBy

• Capacitively Coupled Plasma (CCP) Source  Plasma Source

hasDescription

• Low-pressure RF plasma between plane electrodes separated by the distance d, driven by a sinusoidal voltage with amplitude V0 and frequency f; d = 2.5 cm (argon) resp. 6.7 cm (helium); V0 = 50-250 V; f = 13.56 MHz; Current density: 10 A/m^2; Gas temperature: 300 K; Pressure: 10-80 Pa 

involvedIn

• Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas  Plasma Study
• comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon  Plasma Study