Plasma-kg

developedBy

• Advanced Energy 

hasDeviceType

• Automatic Matching Network  Device Type
• matching network  Device Type

partOf

• Capacitively Coupled Plasma (CCP) Source  Plasma Source
• asymmetric capacitively coupled radio frequency discharge reactor  Plasma Source

usedIn

• Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas  Plasma Study
• Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities  Plasma Study