Plasma-kg

conductedBy

• Gazeli, Kristaq   Person
• INP Greifswald  Institute
• Invernizzi, Laurent   Person
• Leibniz Institute for Plasma Science and Technology (INP)  Institute
• Lombardi, Guillaume   Person
• Lü, Xiang   Person
• Macherius, Uwe   Person
• Schrottke, Lutz   Person
• Weltmann, Klaus-Dieter   Person
• Wubs, Jente R.  Person
• van Helden, Jean-Pierre   Person

describesMaterialEntity

• asymmetric capacitively coupled radio frequency discharge reactor  Plasma Source

hasMedium

• O2  Medium

hasOutput

• Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities  Dataset

hasPlasmaSource

• Capacitively Coupled Plasma (CCP) Source  Plasma Source
• asymmetric capacitively coupled radio frequency discharge reactor  Plasma Source

hasTopic

• Plasma Chemical Processes  Research Topic
• THz spectroscopy  Research Topic
• absorption spectroscopy  Research Topic
• laser induced fluorescence  Research Topic
• measuring atomic oxygen densities in plasmas  Research Topic

investigates

• fine structure transition 
• laser induced fluorescence 
• two-photon absorption 

involves

• low-pressure capacitively coupled radio frequency oxygen discharge  Plasma

usesConfiguration

• An asymmetric capacitively coupled radio frequency discharge was investigated. The planar RF electrode was made of stainless steel and had a diameter of 120 mm. It was powered at 13.56 MHz by an RF generator (Advanced Energy, Cesar 133) and an automatic matching network (Advanced Energy, Navio). The RF electrode was positioned at a distance of 55 mm beneath the top surface of the grounded reactor vessel, which consisted of aluminum and was cylindrically shaped, with a diameter of 240 mm and a height of 105 mm. The applied RF power was varied between 20 and 100 W. 
• Configuration of the CCP: RF power: 20-100 W; Frequency: 13.56 MHz; Electrode distance: 55 mm 
• Configuration of the TALIF diagnostic: Laser repetition rate: 5 Hz; Streak camera time range: 200 ns; Streak camera gain: full; Total acquisition time: 200 s; Accumulation: 1000 laser shots 
• Configuration of the THz QCL: continuous-wave mode; Operating temperature: 44.30 K; Temperature fluctuations: < 5 mK; Waveform: sawtooth; Frequency: 11 Hz 
• Configuration of the gas medium: Pressure: 0.7 mbar or 1.3 mbar; Flow rate: 45 sccm or 50 sccm 

usesDevice

• APL2100, EKSPLA  Diagnostic Device
• Advanced Energy Cesar 133  Diagnostic Device
• Advanced Energy Navio  Diagnostic Device
• DG645, Stanford Research  Device
• Hamamatsu C10910-05  Diagnostic Device
• Hamamatsu ORCA-Flash4.0 V3  Diagnostic Device
• Infrared Laboratories 4.2K Bolometer  Diagnostic Device
• K535, Ricor  Device
• MKS 1179A  Diagnostic Device
• MKS PR4000  Diagnostic Device
• PG411, EKSPLA  Diagnostic Device
• PL3140, EKSPLA  Diagnostic Device
• R&S RTO 1014  Diagnostic Device
• Stanford Research Systems CTC100  Diagnostic Device
• Tektronix AFG 3022 C  Diagnostic Device
• Wavelength Electronics QCL1000  Diagnostic Device
• Welch-Ilmvac CDK 263  Diagnostic Device
• tunable THz QCL  Diagnostic Device

usesMethod

• Terra Hertz (THz) Absorption Spectroscopy  Diagnostic Method
• Two-Photon Absorption Laser Induced Fluorescence (TALIF)  Diagnostic Method
• picosecond two-photon absorption laser induced fluorescence spectroscopy (ps-TALIF)  Diagnostic Method