Benchmarking THz Absorption Spectroscopy against Picosecond TALIF for Atomic Oxygen Density Measurements in Capacitively Coupled RF Oxygen Discharges Plasma Study

Other

conductedBy

Gazeli, Kristaq Person
INP Greifswald Institute
Invernizzi, Laurent Person
Leibniz Institute for Plasma Science and Technology (INP) Institute
Lombardi, Guillaume Person

hasMedium

O2 Medium

hasOutput

Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities Dataset

hasPlasmaSource

Capacitively Coupled Plasma (CCP) Source Plasma Source

hasTopic

Plasma Chemical Processes Research Topic

usesConfiguration

An asymmetric capacitively coupled radio frequency discharge was investigated. The planar RF electrode was made of stainless steel and had a diameter of 120 mm. It was powered at 13.56 MHz by an RF generator (Advanced Energy, Cesar 133) and an automatic matching network (Advanced Energy, Navio). The RF electrode was positioned at a distance of 55 mm beneath the top surface of the grounded reactor vessel, which consisted of aluminum and was cylindrically shaped, with a diameter of 240 mm and a height of 105 mm. The applied RF power was varied between 20 and 100 W.

usesDevice

Advanced Energy Cesar 133 Diagnostic Device
Advanced Energy Navio Diagnostic Device
Hamamatsu C10910-05 Diagnostic Device
Hamamatsu ORCA-Flash4.0 V3 Diagnostic Device
Infrared Laboratories 4.2K Bolometer Diagnostic Device

usesMethod

Terra Hertz (THz) Absorption Spectroscopy Diagnostic Method
Two-Photon Absorption Laser Induced Fluorescence (TALIF) Diagnostic Method