Plasma-kg

consistsOf

• Capacitively Coupled Plasma (CCP) Source  Plasma Source

developedBy

• Advanced Energy 

hasDeviceType

• Radio Frequency (RF) Generator  Device Type

involvedIn

• Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas  Plasma Study

partOf

• asymmetric capacitively coupled radio frequency discharge reactor  Plasma Source

usedIn

• Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas  Plasma Study
• Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities  Plasma Study