usedIn Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas Plasma Study Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities Plasma Study
usedToDiagnose Capacitively Coupled Plasma (CCP) Source Plasma Source asymmetric capacitively coupled radio frequency discharge reactor Plasma Source low-pressure capacitively coupled radio frequency oxygen discharge Plasma
