Plasma-kg

conductedBy

• Biermann, Klaus  Person
• Grahn, Holger T.  Person
• Lü, Xiang   Person
• Macherius, Uwe   Person
• Röben, Benjamin  Person
• Schrottke, Lutz   Person
• Weltmann, Klaus-Dieter   Person
• Wubs, Jente R.  Person
• van Helden, Jean-Pierre   Person

hasMedium

• O2  Medium

hasOutput

• Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - Dataset  Dataset

hasPlasmaSource

• CCP  Plasma Source

hasTopic

• measuring atomic oxygen densities in plasmas  Research Topic
• quantitative atomic density measurements in harsh environments  Research Topic

investigates

• THz absorption 
• fine structure transition 

involves

• Advanced Energy Cesar 133  Diagnostic Device
• ground-state atomic oxygen 
• low-pressure capacitively coupled radio frequency oxygen discharge  Plasma

usesConfiguration

• Configuration for CCP: planar RF electrode diameter 120 mm; powered at 13.56 MHz; RF electrode positioned 55 mm beneath top surface of grounded reactor vessel (diameter 240 mm, height 105 mm); applied RF power 20-100 W; base pressure <5E-4 mbar; operating pressure 0.7 or 1.3 mbar; O2 flow rate 70 sccm 
• Configuration for THz absorption spectroscopy: tunable THz QCL in continuous-wave mode; QCL operating temperature 44.30 K or 54.45 K with <5 mK stability; laser frequency tuned by linearly ramping input current from a laser driver controlled by a function generator providing 10 Hz sawtooth waveforms; phase-locked optical chopper at 5 Hz; collimated beam diameter ~3 mm; laser beam path at ~18 mm above RF electrode; effective absorption length 84 cm 

usesDevice

• Advanced Energy Cesar 133  Diagnostic Device
• Advanced Energy Navio  Diagnostic Device
• Infrared Laboratories 4.2K Bolometer  Diagnostic Device
• K535, Ricor  Device
• MKS 1179A with control unit MKS 647C, MKS  Device
• Model 3502, New Focus  Diagnostic Device
• R&S RTO 1014  Diagnostic Device
• Stanford Research Systems CTC100  Diagnostic Device
• TSU 062, Pfeiffer Balzers  Device
• Tektronix AFG 3022 C  Diagnostic Device
• Wavelength Electronics QCL1000  Diagnostic Device
• oxygen gas cylinder, Air Liquide  Device
• tunable THz QCL  Diagnostic Device

usesMethod

• Terra Hertz (THz) Absorption Spectroscopy  Diagnostic Method
• high-resolution absorption spectroscopy  Diagnostic Method