conductedBy
- Biermann, Klaus Person
- Grahn, Holger T. Person
- Lü, Xiang Person
- Macherius, Uwe Person
- Röben, Benjamin Person
- Schrottke, Lutz Person
- Weltmann, Klaus-Dieter Person
- Wubs, Jente R. Person
- van Helden, Jean-Pierre Person
Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas
Plasma Study
Plasma-kg
hasMedium
- O2 Medium
hasOutput
hasPlasmaSource
- Capacitively Coupled Plasma (CCP) Source Plasma Source
hasTopic
- measuring atomic oxygen densities in plasmas Research Topic
- quantitative atomic density measurements in harsh environments Research Topic
investigates
involves
usesConfiguration
- Configuration for CCP: planar RF electrode diameter 120 mm; powered at 13.56 MHz; RF electrode positioned 55 mm beneath top surface of grounded reactor vessel (diameter 240 mm, height 105 mm); applied RF power 20-100 W; base pressure <5E-4 mbar; operating pressure 0.7 or 1.3 mbar; O2 flow rate 70 sccm
- Configuration for THz absorption spectroscopy: tunable THz QCL in continuous-wave mode; QCL operating temperature 44.30 K or 54.45 K with <5 mK stability; laser frequency tuned by linearly ramping input current from a laser driver controlled by a function generator providing 10 Hz sawtooth waveforms; phase-locked optical chopper at 5 Hz; collimated beam diameter ~3 mm; laser beam path at ~18 mm above RF electrode; effective absorption length 84 cm
usesDevice
- Advanced Energy Cesar 133 Diagnostic Device
- Advanced Energy Navio Diagnostic Device
- Infrared Laboratories 4.2K Bolometer Diagnostic Device
- K535, Ricor Device
- MKS 1179A with control unit MKS 647C, MKS Device
- Model 3502, New Focus Diagnostic Device
- R&S RTO 1014 Diagnostic Device
- Stanford Research Systems CTC100 Diagnostic Device
- TSU 062, Pfeiffer Balzers Device
- Tektronix AFG 3022 C Diagnostic Device
- Wavelength Electronics QCL1000 Diagnostic Device
- oxygen gas cylinder, Air Liquide Device
- tunable THz QCL Diagnostic Device
usesMethod
- Terra Hertz (THz) Absorption Spectroscopy Diagnostic Method
- high-resolution absorption spectroscopy Diagnostic Method