Plasma-kg

conductedBy

• Becker, Markus M.  Person
• Kählert, Hanno  Person
• Loffhagen, Detlef   Person
• Sun, Anbang  Person

hasMedium

• Ar  Medium
• He  Medium

hasOutput

• Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas  Dataset

hasPlasmaSource

• CCP  Plasma Source

hasTopic

• benchmark data  Research Topic
• plasma modelling/simulation  Research Topic

investigates

• electron energy transport 

involves

• Ar  Medium
• CCRF discharge in argon  Plasma
• CCRF discharge in helium  Plasma
• Low-pressure RF plasma  Plasma
• electron component 
• ions 

partOf

• Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas  Plasma Study

usesConfiguration

• Low-pressure RF plasma between plane electrodes separated by the distance d, driven by a sinusoidal voltage with amplitude V0 and frequency f; d = 2.5 cm (argon) resp. 6.7 cm (helium); V0 = 50-250 V; f = 13.56 MHz; Current density: 10 A/m^2; Gas temperature: 300 K; Pressure: 10-80 Pa 

usesDevice

• CCP  Plasma Source

usesMethod

• Fluid-Poisson Model  Diagnostic Method
• classical drift-diffusion model DDA53  Diagnostic Method
• drift-diffusion model DDAn  Diagnostic Method
• pic-mcc simulation  Diagnostic Method
• time-dependent two-moment model  Diagnostic Method