Plasma-kg

consistsOf

• He  Medium
• electron component 
• ions 

diagnosedUsing

• Fluid-Poisson Model  Diagnostic Method
• pic-mcc simulation  Diagnostic Method

generatedBy

• Capacitively Coupled Plasma (CCP) Source  Plasma Source

involvedIn

• Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas  Plasma Study
• comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon  Plasma Study