Plasma-kg

developedBy

• BOC UK  Company

hasDescription

• Low-pressure RF plasma between plane electrodes separated by the distance d, driven by a sinusoidal voltage with amplitude V0 and frequency f; d = 2.5 cm (argon) resp. 6.7 cm (helium); V0 = 50-250 V; f = 13.56 MHz; Current density: 10 A/m^2; Gas temperature: 300 K; Pressure: 10-80 Pa 

hasProperty

• Property of Helium 

mediumOf

• Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas  Plasma Study
• Non-thermal plasma in contact with water: The origin of species  Plasma Study
• The spatial density distribution of H2O2 in the effluent of the COST-Jet and the kINPen-sci operated with a humidified helium feed gas  Plasma Study
• comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon  Plasma Study

partOf

• CCRF discharge in helium  Plasma
• Humidified helium  Medium
• Low-pressure RF plasma  Plasma
• dry helium  Medium
• effluent of the kINPen-sci plasma jet  Plasma
• feed gas of helium  Medium
• water-saturated helium  Medium

usedIn

• COST-Jet  Plasma Source
• Capacitively Coupled Plasma (CCP) Source  Plasma Source
• High Frequency (HF) Plasma Jet  Plasma Source
• kINPen-sci  Plasma Source