Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas Dataset

Plasma-kg

describesMaterialEntity

Low-pressure RF plasma Plasma

outputOf

Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas Plasma Study
comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon Plasma Study

Digital Object Identifier (DOI)

https://doi.org/10.34711/inptdat.72