Plasma-kg

consistsOf

• Advanced Energy Cesar 133  Diagnostic Device
• Advanced Energy Navio  Diagnostic Device
• Welch-Ilmvac CDK 263  Diagnostic Device
• grounded reactor vessel 
• plane electrodes 
• reactor outlet 
• throttle valve 

describedIn

• Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities  Plasma Study

diagnosedUsing

• APL2100, EKSPLA  Diagnostic Device
• Hamamatsu C10910-05  Diagnostic Device
• Hamamatsu ORCA-Flash4.0 V3  Diagnostic Device
• Infrared Laboratories 4.2K Bolometer  Diagnostic Device
• PG411, EKSPLA  Diagnostic Device
• PL3140, EKSPLA  Diagnostic Device
• R&S RTO 1014  Diagnostic Device
• tunable THz QCL  Diagnostic Device

diagnosedUsing

• Terra Hertz (THz) Absorption Spectroscopy  Diagnostic Method
• picosecond two-photon absorption laser induced fluorescence spectroscopy (ps-TALIF)  Diagnostic Method

generates

• low-pressure capacitively coupled radio frequency oxygen discharge  Plasma

hasApplicationField

• Basic Research  Application Field

hasConfiguration

• Configuration of the CCP: RF power: 20-100 W; Frequency: 13.56 MHz; Electrode distance: 55 mm 

hasExperiencedAgent

• Gazeli, Kristaq   Person
• Invernizzi, Laurent   Person
• Lombardi, Guillaume   Person
• Lü, Xiang   Person
• Macherius, Uwe   Person
• Schrottke, Lutz   Person
• Weltmann, Klaus-Dieter   Person
• Wubs, Jente R.  Person
• van Helden, Jean-Pierre   Person

hasSpecification

• Specification for the CCP: AC, high frequency, low pressure, non-thermal; planar RF electrode diameter: 120 mm; grounded reactor vessel diameter: 240 mm; grounded reactor vessel height: 105 mm 

plasmaSourceOf

• Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities  Plasma Study

usesMedium

• O2  Medium