Plasma-kg

consistsOf

• Pfeiffer CMR 362, Pfeiffer Vacuum  Diagnostic Device
• drift cell 
• rotary pump  Device
• stainless steel 

hasDeviceType

• vacuum chamber  Device Type
• vacuum chamber  Device

hasSpecification

• Specification for vacuum chamber: made of stainless steel 

partOf

• scanning drift tube apparatus  Plasma Source

typeOf

• vacuum chamber  Device

usedIn

• Electron swarm parameters in C2H4 - measurements and kinetic calculations  Plasma Study
• Electron swarm parameters in C2H6 - measurements and kinetic calculations  Plasma Study
• Electron swarm transport coefficients in CO - measurements and kinetic studies  Plasma Study

usedIn

• scanning drift tube apparatus  Plasma Source

usesMaterialEntity

• rotary pump  Device
• turbomolecular pump  Device