Plasma-kg

hasDeviceType

• pump  Device Type
• turbomolecular pump  Device Type
• turbomolecular pump  Device

hasSpecification

• Specification for pumping system: base pressure ~1 x 10^-7 mbar 
• Specification for vacuum chamber pump system: base pressure: ~1 x 10^-7 mbar 

partOf

• scanning drift tube apparatus  Plasma Source

typeOf

• turbomolecular pump  Device

usedIn

• Electron swarm parameters in C2H2 - measurements and kinetic calculations  Plasma Study
• Electron swarm parameters in C2H4 - measurements and kinetic calculations  Plasma Study
• Electron swarm parameters in C2H6 - measurements and kinetic calculations  Plasma Study
• Electron swarm transport coefficients in CO - measurements and kinetic studies  Plasma Study

usedIn

• scanning drift tube apparatus  Plasma Source
• vacuum chamber  Device

usesMaterialEntity

• rotary pump  Device