Pfeiffer CMR 362, Pfeiffer Vacuum
Diagnostic Device
Plasma-kg
hasDeviceType
- capacitive gauge Device Type
hasSpecification
measures
partOf
- scanning drift tube apparatus Plasma Source
- vacuum chamber Device
usedIn
- Electron swarm parameters in C2H2 - measurements and kinetic calculations Plasma Study
- Electron swarm parameters in C2H4 - measurements and kinetic calculations Plasma Study
- Electron swarm parameters in C2H6 - measurements and kinetic calculations Plasma Study
- Electron swarm transport coefficients in CO - measurements and kinetic studies Plasma Study
usedIn
- scanning drift tube apparatus Plasma Source
usedToDiagnose
- C2H4 (ethylene) Medium
- C2H6 Medium
- electron swarm Plasma