Plasma-kg

developedBy

• Pfeiffer 

hasDeviceType

• capacitive gauge  Device Type

hasSpecification

• Specification for CMR 362, Pfeiffer: type: capacitive gauge; measurement range: 5 to 1000 Pa 

measures

• gas pressure = 11.8 to 1010 Pa 
• working gas pressure = 5 to 1000 Pa 

partOf

• scanning drift tube apparatus  Plasma Source
• vacuum chamber  Device

usedIn

• Electron swarm parameters in C2H2 - measurements and kinetic calculations  Plasma Study
• Electron swarm parameters in C2H4 - measurements and kinetic calculations  Plasma Study
• Electron swarm parameters in C2H6 - measurements and kinetic calculations  Plasma Study
• Electron swarm transport coefficients in CO - measurements and kinetic studies  Plasma Study

usedIn

• scanning drift tube apparatus  Plasma Source

usedToDiagnose

• C2H4 (ethylene)  Medium
• C2H6  Medium
• electron swarm  Plasma