Plasma-kg

conductedBy

• Ellis, James   Person
• Harhausen, Jens  Person
• INP Greifswald  Institute
• Lang, Norbert   Person
• Leibniz Institute for Plasma Science and Technology (INP)  Institute
• Sigeneger, Florian   Person
• van Helden, Jean-Pierre   Person

hasMedium

• H2  Medium

hasOutput

• Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance - dataset  Dataset

hasPlasmaSource

• AURA-WAVE (Sairem)  Plasma Source

hasTopic

• ECR plasma  Research Topic
• Materials / Surfaces  Research Topic
• Model validation  Research Topic
• Plasma Chemical Processes  Research Topic
• basic research  Application Field
• fluid modelling  Research Topic
• microwave propagation  Research Topic
• plasma generation  Research Topic
• power density  Research Topic
• species transport  Research Topic

investigates

• Electron cyclotron resonance (ECR) 
• ion saturation 
• laser induced fluorescence 
• microwave frequency excitation 
• two-photon absorption 

involves

• low pressure electron cyclotron resonance hydrogen plasma  Plasma

usesConfiguration

• Configuration for Nd:YAG pump laser: pulse width 6 ns 
• Configuration for RFEA probe: positioned along the axis of symmetry at distances from 10 to 25 cm from the ECR source 
• Configuration for TALIF detection of hydrogen: imaging region of interest ~10x2 mm, spectral filter bandwidth 10 nm centered at ~656 nm 
• Configuration for TALIF detection of krypton: imaging region of interest ~10x2 mm, spectral filter bandwidth 10 nm centered at ~825 nm 
• Configuration for dye laser: wavelength 615 nm 
• Configuration for plasma reactor at 5 Pa: H2 gas purity 6.0, flow 100 sccm 
• Configuration for plasma reactor at 7 Pa: H2 gas purity 6.0, flow 100 sccm 

usesDevice

• AURA-WAVE (Sairem)  Plasma Source
• Andor iStar DH734x  Diagnostic Device
• Comsol Multiphysics  Device
• Nikon lens systems, Nikon  Diagnostic Device
• Precision Scan SL dye laser, Sirah  Diagnostic Device
• Quanta Ray Nd:YAG pump laser, Spectra Physics  Diagnostic Device
• UHV-manipulator  Diagnostic Device
• plasma reactor  Device
• retarding field energy analyzer (RFEA)  Diagnostic Device
• spectral filter  Diagnostic Device

usesMethod

• Fluid-Poisson Model  Diagnostic Method
• I-V characteristic measurement  Diagnostic Method
• Retarding Field Energy Analyzer (RFEA)  Diagnostic Method
• Two-Photon Absorption Laser Induced Fluorescence (TALIF)  Diagnostic Method
• frequency doubling  Method
• measurement of the total ion current  Diagnostic Method
• planar probe measurement  Diagnostic Method
• self-consistent fluid model  Method
• simplified linear extrapolation  Method
• solving stationary spatially homogeneous electron Boltzmann equation  Method
• sum-frequency generation  Method