Other

generates

• Microwave Plasma  Plasma

hasApplicationField

• Biological Decontamination  Application Field
• Etching  Application Field
• Plasma-Enhanced Chemical Vapor Deposition (PECVD)  Application Field
• Reactive Species Generation  Application Field
• Surface Treatment  Application Field

plasmaSourceOf

• Self-Consistent Fluid Model for Low-Pressure ECR Hydrogen Plasma: Validation through Ion Current, Floating Potential, and Atomic Hydrogen Density Measurements  Plasma Study

usedIn

• Self-Consistent Fluid Model for Low-Pressure ECR Hydrogen Plasma: Validation through Ion Current, Floating Potential, and Atomic Hydrogen Density Measurements  Plasma Study

usesMedium

• Ar  Medium
• N2  Medium
• O2  Medium