Plasma-kg

consistsOf

• AURA-WAVE (Sairem)  Plasma Source
• UHV-manipulator  Diagnostic Device
• back flange 
• retarding field energy analyzer (RFEA)  Diagnostic Device

hasConfiguration

• Configuration for plasma reactor at 5 Pa: H2 gas purity 6.0, flow 100 sccm 
• Configuration for plasma reactor at 7 Pa: H2 gas purity 6.0, flow 100 sccm 

hasDeviceType

• reactor  Plasma Source Type

hasSpecification

• Specification for plasma reactor: volume ~70 l 

usedIn

• Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance  Plasma Study