Plasma-kg

consistsOf

• electrode 

hasConfiguration

• Configuration for RFEA probe: positioned along the axis of symmetry at distances from 10 to 25 cm from the ECR source 

hasDeviceType

• analyzer  Device Type
• probe  Device Type

hasSpecification

• Specification for retarding field energy analyzer (RFEA): can be used as a planar probe by applying a separate bias to the front electrode 

measures

• ion current density 
• total ion current 
• floating potential 

partOf

• plasma reactor  Device

usedIn

• Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance  Plasma Study

usedIn

• UHV-manipulator  Diagnostic Device

usedToDiagnose

• low pressure electron cyclotron resonance hydrogen plasma  Plasma