Plasma-kg

consistsOf

• mulitpass optics, neoplas control  Diagnostic Device

developedBy

• neoplas control GmbH 

hasConfiguration

• Configuration for Q-MACS process fiber system: Effective absorption length 5.4 m (12 passes); Time resolution 1 Hz; Absorption detection range 1030.90 cm-1 - 1031.00 cm-1 

hasDeviceType

• Quantum Cascade Laser (QCL)  Device Type

hasSpecification

• Specification for Q-MACS process fiber system: effective absorption length 5.4 m (12 passes); time resolution 1 Hz 

measures

• SiF4 absorption wavenumber range = 1030.90 - 1031.00 cm-1 

usedIn

• On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes  Plasma Study

usedToDiagnose

• Fluorocarbon-based plasma (CF4/CHF3/Ar)  Plasma
• SiF4