Plasma-kg

addresses

• What are the energy transfer mechanisms that explain trends in temperatures and number densities observed for NH3 generated in low-pressure nitrogen-hydrogen (N2–H2) plasmas? 
• What are the reaction pathways that lead to desirable products in plasma-activated NH3 generation? 

conductedBy

• Advanced Semiconductor Materials Lithography (ASML Holding N.V)  Company
• Engeln, Richard   Person
• Fleisher, Adam J.  Person
• Hayden, Jakob  Person
• Huang, Xinyi   Person
• Hugi, Andreas   Person
• INP Greifswald  Institute
• IRsweep AG  Company
• Lang, Norbert   Person
• Leibniz Institute for Plasma Science and Technology (INP)  Institute
• Sadiek, Ibrahim   Person
• TU/e Department of Applied Physics  Department
• van Helden, Jean-Pierre   Person

describesMaterialEntity

• Non-Thermal Plasma  Plasma
• Stainless Steel  Target

hasMedium

• H2  Medium
• N2  Medium
• N2-H2 gas mixture  Medium

hasOutput

• Dual-comb spectroscopy of ammonia formation in non-thermal plasmas  Dataset

hasPlasmaSource

• PNC Reactor  Plasma Source

hasTarget

• Stainless Steel  Target

hasTopic

• Ammonia formation in non-thermal plasmas  Research Topic
• Energy transfer mechanisms  Research Topic
• Plasma Chemical Processes  Research Topic
• Quantum-state-resolved information  Research Topic
• Reaction pathways  Research Topic

investigates

• Plasma-activated chemical transformation 
• energy transfer 
• plasma-activated NH3 generation 

involves

• NH3  Medium
• Non-Thermal Plasma  Plasma
• Stainless Steel  Target

usesConfiguration

• Configuration for IRis-core dual-comb source: Spectral range: 1035 cm−1 to 1085 cm−1; Repetition rate: ≈7.417 GHz; Difference in repetition rates: 2.1 MHz; Average output optical power: ≥100 mW; Attenuation: ~10x with neutral density filters; Optical path: reference and probe paths focused by off-axis parabolic mirrors (focal length 25.4 mm) 
• Configuration for PNC reactor: DC voltage; Power: 355 ± 50 W; Pressure: 1 mbar; Gas flow rate: (500 ± 5) sccm of N2 and H2 mixtures; Workload: negatively biased; Cooling: outer wall cooled to 295 K ± 1 K 
• The plasma was generated in a plasma nitrocarburizing (PNC) reactor for all the measurements, with DC voltage and a power of 355 ± 50 W. 

usesDevice

• IRsweep IRis-core  Diagnostic Device
• PNC Reactor  Plasma Source
• photodetectors  Diagnostic Device

usesMethod

• Quantum Cascade Laser Absorption Spectroscopy (QCLAS)  Diagnostic Method
• Quantum Cascade Laser Dual-Comb Spectroscopy (QCL-DCS)  Diagnostic Method
• broadband spectral analysis  Method