consistsOf Atmospheric Pressure Gas flow rate = 2 slm to 16 slm Input microwave power = 1 kW Input microwave power = 1.5 kW Microwave frequency = 2.45 GHz Oxygen admixture in mass = 1 % to 95 %
usedIn The effect of oxygen admixture on the properties of microwave generated plasma in Ar-O₂ : a modelling study Plasma Study