Plasma-kg

consistsOf

• quartz tube 
• rectangular waveguide 

generates

• Microwave Plasma  Plasma
• pure Ar plasma  Plasma

hasApplicationField

• deposition  Application Field

hasConfiguration

• Configuration for atmospheric pressure MW discharge: Frequency: 2.45 GHz; Pressure: atmospheric pressure; Input microwave power: 1 kW and 1.5 kW; Oxygen admixture: 1% to 95% in mass; Gas flow rate: 2 slm to 16 slm 

hasDeviceType

• Plasma Torch  Plasma Source Type
• atmospheric pressure MW discharge  Plasma Source Type

hasProperty

• Properties of the microwave plasma: Absorbed power: 56 W to 211 W; Electron temperature: 0.87 eV to 1.1 eV; Electron number density: ~10^20 m^-3; Gas temperature: increases with oxygen admixture, > 3700 K in the core; Oxygen atom number density: ~10^23 m^-3 

hasSpecification

• Specification for atmospheric pressure MW discharge, plasma torch: microwave, AC, atmospheric pressure, non-thermal 

plasmaSourceOf

• The effect of oxygen admixture on the properties of microwave generated plasma in Ar-O₂ : a modelling study  Plasma Study

usedIn

• The effect of oxygen admixture on the properties of microwave generated plasma in Ar-O₂ : a modelling study  Plasma Study

usesMedium

• Ar  Medium
• Ar-O2  Medium