partOf

• Configuration for AURA-WAVE: microwave frequency excitation 2.45 GHz; applied power range 100 – 150 W; chamber wall temperature varied in the range of 20° – 100°C; volume of the plasma reactor about 80 l 
• Configuration for atmospheric pressure MW discharge: Frequency: 2.45 GHz; Pressure: atmospheric pressure; Input microwave power: 1 kW and 1.5 kW; Oxygen admixture: 1% to 95% in mass; Gas flow rate: 2 slm to 16 slm 
• Specification for AURA-WAVE (Sairem): microwave, low pressure, AC, non-thermal, microwave frequency excitation 2.45 GHz, applied power range 50 – 150 W