consistsOf Ar feed gas flow rate = 3 slm Maximum feed gas humidity content = 1370 ppm N₂/O₂ gas curtain flow rate = 5 slm Operating power = 1-3 W kINPen-sci operating frequency = 860 MHz
usedIn Investigation of Ar(³P₂) metastable density in the effluent of a filamentary atmospheric pressure plasma jet with humidified feed gas Plasma Study
