partOf
- Configuration for kINPen-sci plasma source: Frequency: 860 MHz; Power: 1-3 W; Feed gas: 3 slm Ar with humidity contents up to 1370 ppm; Gas curtain: 5 slm N₂/O₂ mixture
- Configuration for kINPen-sci: Frequency ~1 MHz; Power 1-3 W; Feed gas 3 slm Ar with 3000 ppm humidity; Gas curtain 5 slm O₂
- Frequency: ~1MHz; Power: 1-3 W; Feed gas: 3 slm Ar with 3000 ppm humidity; Gas curtain: 5 slm O2