partOf Configuration for kINPen-sci plasma source: Frequency: 860 MHz; Power: 1-3 W; Feed gas: 3 slm Ar with humidity contents up to 1370 ppm; Gas curtain: 5 slm N₂/O₂ mixture Specification for kINPen-sci: atmospheric pressure, AC, high frequency, non-thermal; Frequency: 860 MHz; Power: 1-3 W
