measures CH4 flow during conditioning = 8 slh O2 flow in set 1 = 4.8 slh O2 flow in set 2 = 1.6 slh Total gas flow = 100 sccm Total gas flow = 80 slh Total gas flow for multi-filament arrangement = 300 sccm
partOf active screen plasma nitrocarburizing (ASPNC) reactor Plasma Source multi-filament arrangement single-filament arrangement
usedIn Impact of the electrode proximity on the streamer breakdown and development of pulsed dielectric barrier discharges Plasma Study Laser absorption spectroscopy for plasma-assisted thermochemical treatment Plasma Study Upscaling from single- to multi-filament dielectric barrier discharges in pulsed operation Plasma Study