measuredUsing
- mass flow controllers Diagnostic Device
- mass flow controllers Device
Total gas flow = 100 sccm
Plasma-kg
partOf
- Configuration for Centura 5200: Radio frequency (RF) excitation at 13.56 MHz; RF power 600 W; Chamber wall temperature 288 K; Substrate temperature 288 K; Total gas flow 100 sccm; Total pressure 100 mTorr
- Configuration for gas flow in single-filament arrangement: Total gas flow: 100 sccm
- Configuration for gas medium: up to 10vol% N2O in N2 at atmospheric pressure; total gas flow 100 sccm