hasConfiguration Configuration for SE850 system: Incident angles 50°, 60°, and 70°; Wavelength range 400-850 nm
hasSpecification Specification for SE850 system: incident angles 50°, 60°, and 70°; wavelength range 400-850 nm
usedIn On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes Plasma Study