Configuration for XPS setup: Pass energy 200 eV; Monochromatic Al-Kα radiation; Charging compensation with electron flood gun (Si 2p peak shifted to 103.5 eV)

Plasma-kg

configurationOf

MX 650 X-ray source, VG Scienta Diagnostic Device
R3000 electron energy analyzer, VG Scienta Diagnostic Device

consistsOf

usedIn

On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes Plasma Study