Plasma-kg

developedBy

• MKS 

hasDeviceType

• Mass Flow Controller (MFC)  Device Type

measures

• Gas flow rate = 45 sccm 
• Gas flow rate = 50 sccm 

usedIn

• Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities  Plasma Study

usedIn

• MKS PR4000  Diagnostic Device

usesMaterialEntity

• MKS PR4000  Diagnostic Device