Plasma-kg

consistsOf

• Voltage supply  Device
• dielectric 
• grounded electrode 
• plane electrodes 
• plane steel mesh electrodes 
• powered electrode 

diagnosedUsing

• Fluid-Poisson Model  Diagnostic Method
• current measurement  Diagnostic Method
• fluid modelling  Method
• voltage measurement  Diagnostic Method

generates

• dielectric barrier discharge  Plasma
• discharge plasma  Plasma

hasApplicationField

• Film Deposition  Application Field
• PECVD  Application Field
• plasma-polymerization  Application Field

hasConfiguration

• Atmospheric pressure DBD between plane electrodes covered by dielectrics (glass and Macor); Powered electrode: Macor covered, thickness of dielectric: 3.5 mm; Grounded electrode: glass covered, thickness of dielectric: 3.0 mm; Discharge gap: 2 mm; Discharge area: 216 cm^2; Voltage supply: sinusoidal voltage with amplitude of 3.9 kV and frequency of 20 kHz; RMS current: about 50 mA 
• Configuration for DBD: Atmospheric-pressure DBD between plane steel mesh electrodes covered by dielectrics (borofloat glass, relative permittivity: 4.6); Electrode area: 8 cm^2; Thickness of dielectrics: 2 mm; Discharge gap: 1 mm; Voltage supply: sinusoidal voltage with variable amplitude and frequency of 86.2 kHz 

hasDescription

• Configuration for DBD: Atmospheric-pressure DBD between plane steel mesh electrodes covered by dielectrics (borofloat glass, relative permittivity: 4.6); Electrode area: 8 cm^2; Thickness of dielectrics: 2 mm; Discharge gap: 1 mm; Voltage supply: sinusoidal voltage with variable amplitude and frequency of 86.2 kHz 

hasDeviceType

• Dielectric Barrier Discharge (DBD)  Plasma Source Type

hasExperiencedAgent

• Becker, Markus M.  Person
• Czerny, Andreas K.  Person
• Klages, Claus-Peter  Person
• Loffhagen, Detlef   Person

hasProperty

• Properties of DBD: Atmospheric-pressure DBD between plane steel mesh electrodes covered by dielectrics (borofloat glass, relative permittivity: 4.6); Electrode area: 8 cm^2; Thickness of dielectrics: 2 mm; Discharge gap: 1 mm; Voltage supply: sinusoidal voltage with variable amplitude and frequency of 86.2 kHz 

hasSpecification

• AC, low frequency, atmospheric pressure, non-thermal 
• Specification for DBD: AC, low frequency, atmospheric pressure, non-thermal 

plasmaSourceOf

• Electrical characteristics of atmospheric-pressure DBD in argon with small admixtures of TMS - measured and calculated data  Plasma Study
• Plasma parameters in an Ar-HMDSO DBD at atmospheric pressure for plasma-polymerization experiments  Plasma Study

usesMaterialEntity

• Voltage supply  Device

usesMedium

• Ar  Medium
• HMDSO  Medium
• argon-HMDSO mixtures  Medium