Plasma-kg

consistsOf

• Ar  Medium
• HMDSO  Medium

diagnosedUsing

• Fluid-Poisson Model  Diagnostic Method

hasProperty

• Gas temperature: 300 K; Pressure: 1 atm; Gas mixture: Ar + 20 to 1600 ppm HMDSO 

mediumOf

• Plasma parameters in an Ar-HMDSO DBD at atmospheric pressure for plasma-polymerization experiments  Plasma Study

usedIn

• Dielectric Barrier Discharge (DBD)  Plasma Source