Plasma-kg

developedBy

• Bronkhorst  Company

hasDeviceType

• Mass Flow Controller (MFC)  Device Type

hasSpecification

• Specification for F-201 CM with E-8412-A-10: Flow range: 5 slm 

measures

• Argon flow rate = 2.5 slm 
• Argon flow rate = 5 slm 

usedIn

• Safety and efficiency evaluation of an innovative plasma jet array in argon by gas switching technology  Plasma Study