consistsOf Nitrogen dilution = 0 ppm Nitrogen dilution = 1000 ppm Nitrogen dilution = 1500 ppm Nitrogen dilution = 2500 ppm Nitrogen dilution = 500 ppm Nitrogen dilution = 5000 ppm Pressure = 3 – 7 Pa Total flow rate = 14 sccm
usedIn Evidence of the Dominant Production Mechanism of Ammonia in a Hydrogen Plasma with Parts Per Million of Nitrogen Plasma Study
