consistsOf Distance from nozzle to sample = 10 mm Driving frequency = 24.9 kHz Peak-to-peak Voltage = 18.3 ± 0.2 kV Plasma exposure time = 60 s Reactor flush time = 20 s Return current = ca. 4 - 7 mA Separation distance between copper electrodes = 20 mm Total flow of feed gas = 2 L/min