Plasma-kg

developedBy

• Brooks Instruments 

hasDeviceType

• Mass Flow Controller (MFC)  Device Type

measures

• Total flow of feed gas = 2 L/min 

partOf

• High Frequency (HF) Plasma Jet  Plasma Source

usedIn

• Non-thermal plasma in contact with water: The origin of species  Plasma Study

usedToDiagnose

• feed gas of helium  Medium
• oxygen  Medium
• water admixtures  Medium