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- Configuration for ASPNC reactor: cathodic potential with a pulsed DC high voltage of 1 kHz frequency at a 60 % duty cycle; workload temperature maintained at 813 K (540 °C); AS power about 7.3 kW; bias power 1.25 kW; total flow of 80 slh; pressure of 3 mbar
- Configuration for PLANIMOR: pulsed DC discharge, 1 kHz frequency, 60 % duty cycle, variable plasma powers of 26 W, 45 W, 93 W, and 130 W, 3 mbar pressure, room temperature, no external heating