Plasma-kg

developedBy

• MKS 

hasConfiguration

• Configuration for the gas flow system: gas flow set to 100 sccm 

hasDeviceType

• Mass Flow Controller (MFC)  Device Type

measures

• Gas flow rate = 100 sccm 

usedIn

• Impact of the electrode proximity on the streamer breakdown and development of pulsed dielectric barrier discharges  Plasma Study

usesMaterialEntity

• 647B, MKS  Device