partOf Low-pressure RF plasma between plane electrodes separated by the distance d, driven by a sinusoidal voltage with amplitude V0 and frequency f; d = 2.5 cm (argon) resp. 6.7 cm (helium); V0 = 50-250 V; f = 13.56 MHz; Current density: 10 A/m^2; Gas temperature: 300 K; Pressure: 10-80 Pa
